10th International Conference on Spectroscopic Ellipsometry

June 8-13, 2025, in Boulder, CO, USA

Diamond Sponsors

Welcome Message

You are cordially invited to the 10^th International Conference on Spectroscopic Ellipsometry, ICSE-10, to be held 08-13 June 2025 at the University of Colorado, Boulder, Colorado.

The ICSE Conferences are the premier gatherings of experts and non-experts alike to share knowledge and learn about the latest advances and applications of spectroscopic ellipsometry and related techniques. The meeting consists of a wide variety of tutorials, invited talks, presentations, and posters that cover all aspects of the field, and provides ample opportunities for networking and discussion. The equipment display will cover the latest not only in ellipsometry but also in other methods of learning about surfaces, interfaces, thin films, nanostructures, and bulk materials under both static and dynamic conditions through the use of polarized light.

The meeting will be held on the campus of the University of Colorado at Boulder. The campus is in the foothills of the Rocky Mountains, and is about an hour away from the Denver Airport by public transportation. Boulder is known for its blend of urban and outdoor activities, including a vibrant downtown and talented brewers and chefs. The pedestrian Pearl Street Mall includes numerous art galleries, cafes, restaurants, and boutiques. In addition to spectacular scenery, Boulder provides a wealth of recreational opportunities including biking and hiking. The Rocky Mountain National Park is about 1 ½ hours away.

Organizing Committee

Mathias Schubert

University of Nebraska-Lincoln (USA) & Lund University (Sweden)

David E. Aspnes

North Carolina State University (USA)

Alain C. Diebold

CNSE, University at Albany, SUNY (USA)

Eva Schubert

University of Nebraska-Lincoln (USA)
Workforce and Sponsoring Chair

Markus Raschke

University of Colorado at Boulder (USA)
Local Chair

Years

Months

Days

Hours

Minutes

Secs

Schedule & Abstract Book

Manuscript Submission

Gold Sponsors

Event Venue

ICSE-10 will be held at the University of Colorado’s University Memorial Center (UMC) in Boulder, Colorado, USA. Boulder is located in the foothills of the Rocky Mountains, less than one-hour drive from Denver International Airport. The main conference events such as tutorials, oral presentations, and poster sessions will take place in the Glenn Miller Ballroom. A simultaneous industry exhibition will take place in the adjacent Aspen Rooms.

Attendance Support

ICSE-10 has made available a flat-rate attendance support by discounting student registration and by allocating low-budget housing in Campus Lodging. Attendance Support is thankfully made possible by our Diamond Sponsors.

Scope & Topics

The comprehensive Technical Program will include a broad range of aspects in the field of ellipsometry and polarimetry, as well as related applications utilizing the polarization properties of light as a diagnostic of surfaces, interfaces, thin films, nanostructures, and bulk materials.

Topics cover theory, instrumentation, and applications across physics, chemistry, material science, and life sciences, as well as engineering and metrology.

Theory

Artificial Intelligence and Machine Learning
Data Analysis
Fast data processing
Optical Modeling (Finite Element, ab-initio, …)
Subwavelength Structure Analysis and Modeling
Time-dependence

Instrumentation

Imaging Ellipsometry and High-Resolution
Metrology
Mueller-Matrix Spectroscopy
New Developments
Nonlinear and Time-Resolved Ellipsometry
THz and Extreme Ultraviolet

Applications

Advanced Semiconductor Metrology
Anisotropy and Anisotropic Materials
Artificial Intelligence and Machine Learning
Bio- and Life-Sciences
Correlated Systems
Chemistry and Biochemistry
Ferroelectrics, Piezoelectrics, Ferromagnetics, Antiferromagnetics, Multiferroics
High-Entropy Materials
Imaging
Interfaces
Liquid Crystals
Mueller-Matrix Polarimetry and Scatterometry
Nanomaterials
Optical Properties
Organics and Polymers
Photovoltaics and Renewable Energy Materials
Quantum Materials and Materials for Quantum Applications
Real-time Process Monitoring and Control
Two-Dimensional Systems

From Monday, June 9, through Friday, June 13, 2025, Oral and Poster Sessions will take place in the Glenn Miller Ballroom, including an excellent lineup of Keynote & Invited Speakers.
Please find the up-to-date Schedule of Events in the Abstract Book.

Keynote Speakers

Steven M. George

University of Colorado Boulder (USA)

In-Situ Spectroscopic Ellipsometry Studies of Selective Atomic Layer Deposition and Etch Processes

Alain Diebold

University at Albany, SUNY (USA)

Mueller-Matrix Spectroscopic Ellipsometry based Scatterometry: Optical Dimensional and Shape Analysis

Shiyuan Liu

Huazhong University of Science and Technology (China)

Advanced Mueller-Matrix Ellipsometry: Instrumentation and Emerging Applications

Vanya Darakchieva

Lund University (Sweden)

THz Spectroscopic Ellipsometry and Its Future

Stefan Zollner

New Mexico State University (USA)

Accurate Measurements of Optical Constants using Temperature-Dependent Ellipsometry and Comparison with k.p Theory

Yuxiang Zheng

Fudan University (China)

Half a Century of Spectroscopic Ellipsometry in China

Andy Antonelli

ONTO Innovation (USA)

Have Polarizer – Will Travel: The Need for Ellipsometry Expertise in Industry

Michelle Williams-Vaden

SEMI Foundation (USA)

Workforce Development for Semiconductor Industry

Invited Speakers

David Aspnes

North Carolina State University (USA)

Removing Noise from Spectra: The Next 100 Years.

Hans A. Bechtel

Lawrence Berkeley National Laboratory (USA)

Ultrabroadband infrared nanospectroscopy: From Near to Far

Shirly Espinoza

ELI Beamlines (Czech Republic)

Approaching Ultrafast Phenomena in Materials by Time-Resolved Ellipsometry

Thomas A. Germer

National Institute of Standards and Technology (USA)

EUV spectroscopic ellipsometry and scatterometry

Kurt Hingerl

Johannes Kepler University Linz (Austria)

Applied Spectroscopic Imaging Ellipsometry

Hiroyuki Fujiwara

Gifu University (Japan)

Highly Accurate Classification of Material Types from Spectroscopic Ellipsometry Heatmap Measurements Using Deep Learning

Ufuk Kilic

University of Nebraska-Lincoln (USA)

Metamaterial Platforms: Harnessing Spectrally Controllable Strong Chiroptical Activity and Beyond

Taeyong Jo

Samsung (South Korea)

New Spectroscopic Ellipsometry Instrumentation for Application to the Semiconductor Industry

Peter Petrik

University of Debrecen (Hungary)

Low-Dimensional, Combinatorial and Periodic Structures for Sensing Catalysis – Characterization of Interface Process by In-Situ Spectroscopic Ellipsometry

Angelo Pierangelo

Institut Polytechnique De Paris (France)

Fast, High-Resolution Integrated Multispectral Mueller Ellipsometry for In-Vivo Biomedical Diagnostics

Viktor Rindert

Lund University (Sweden)

Exploring Paramagnetic Resonance through Mueller-Matrix Ellipsometry

Chris Sturm

Universität Leipzig (Germany)

Electromagnetic Waves in Optically Anisotropic Media: Presence and Propagation of Singular States

Bronze Sponsors

Michelle Williams-Vaden

SEMI Foundation (USA)

Workforce Development for Semiconductor Industry

Schedule & Abstract Book

Conference Schedule Overview Detailed Program Overview and Schedule Please find below the detailed Program Schedule in its final version as of June 11, 2025. Please find the placement of your contribution and inform the conference organizers immediately if your scheduled contribution needs to be changed. Complete Abstract Book Please find below a link to download […]

Awards

On Friday, June 13, 2025, the Awards ceremony will recognize excellent achievements at different levels by honoring

with the Hans Mueller Memorial Award and Lecture, shared in equal halves:
Prof. Dr. John A. Woollam, Founder and CEO of J.A. Woollam Co., Inc. and Professor of Electrical and Computer Engineering at the University of Nebaska-Lincoln (USA), for having made pioneering, life-long contributions to the development, application, dissemination, and education in the field of spectroscopic ellipsometry; and
Prof. Dr. David E. Aspnes, Distinguished University Professor Emeritus of Physics at North Carolina State University (USA), for development of fundamental theories of the linear and nonlinear optical properties of materials and thin films, and for pioneering the field of spectroscopic ellipsometry.
with the Paul Drude Award:
Dr. Ufuk Kiliç, Research Associate Professor at the University of Nebraska-Lincoln (USA), for the achievement of having demonstrated and determined unambiguous structural and optical relationships for chiral and achiral nanostructured metamaterials using computational engineering, nanostructure material preparation, and spectroscopic ellipsometry.
with the Innovation and Creativity Award:
Dr. Shirly Espinoza, Scientist at ELI Beamlines. The Extreme Light Infrastructure ERIC. Dolní Břežany (Czech Republic), for developing the first versatile UV-NIR femtosecond pump-probe spectroscopic ellipsometer and for training, educating, and leading a broad and diverse international user community.
with Student Awards for best oral presentations and for best posters:
Undergraduate and graduate students to be determined based on evaluations during the conference.

Industry Exhibition

From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

Friends of ICSE-10

Important Dates

2025/04/01

Deadline for
Late Breaking Abstracts
2025/04/29

Deadline for
Hotel Discounts
2025/05/01

Deadline for
Exhibitor Booth Registration
2025/05/22

Deadline for
Early Registration
2025/05/23

Deadline for
Campus Lodging

Latest Announcements

Eleventh Announcement

June 6, 2025
With less than one day remaining on the countdown, we are excited to open the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) this Sunday, June 8, 2025, at the University of Colorado Boulder’s University Memorial Center (UMC).

We are pleased to announce that ICSE-10 will now feature an option to view conference presentations online remotely. Please Register for Online Viewing Only to obtain access instructions in a follow-up email!

Please also check the latest version of the Program Schedule & Abstract Book.

Event Venue

ICSE-10 will be held at the University of Colorado’s University Memorial Center (UMC). The main conference events such as tutorials, oral presentations, and poster sessions will take place in the Glenn Miller Ballroom. A simultaneous Industry Exhibition will take place in the East wing of the Glenn Miller Ballroom and in the adjacent Aspen Room.

Please check the ICSE-10 website for information about directions, parking, and Wireless Internet (Wi-Fi) Access.

Conference Registration
Conference Registration for ICSE-10 is still open until June 13, 2025.
Registration Fees are set at a rate of:
- $900 for Regular attendees,
- $500 for Student attendees, and
- $300 for Accompanying Guests for Social Events.
- $125 for Online Viewing Only (access instructions via follow-up email)
The Registration Fees for Regular and Student attendees include all activities of the Technical Program and Social Events at no extra cost to participants.
Please register on the ICSE-10 Online Registration website now!

Program Schedule & Abstract Book

The latest up-to-date version of the Program Schedule & Abstract Book is online.

Please find the placement of your contribution in the Schedule of Events.
Please also double check that your abstract is displayed satisfactorily.

Oral Presenter Guidelines
Please prepare your talks according to the following time allocations:
- Tutorials: 50 min + 10 min Questions & Answers;
- Keynotes: 25 min + 5 min Q&A;
- Invited Talks: 17 min + 3 min Q&A;
- Contributed Talks: 12 min + 3 min Q&A.
Please note that session chairs will keep these time limits absolutely sharp!
IMPORTANT: All oral presenters must upload their presentation file to the following MS SharePoint page no later than the evening before their scheduled presentation day! If a scheduled oral presentation file is not uploaded in time, it may be replaced by a standby presentation. We are thankful to our standby presenters for being available throughout the week.
We kindly ask to rename Power Point or PDF presentation files “Abstract#-LastName-First-Name” before uploading.

Upload “Abstract#-LastName-First-Name” Presentation File

Poster Presenter Guidelines

Poster boards are upright with dimensions of 4 feet wide by 8 feet high. One poster is associated with one poster board. The usable area in each poster board is 4 feet by 7 feet. You may prepare your poster in any form or shape as desired fitting within the usable area.

Posters for Session I should be displayed by Monday morning and removed before the Excursion on Tuesday afternoon.
Posters for Session II should be displayed by Wednesday at noon and removed before the Award Ceremony on Friday morning.

Industry Exhibition

From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the East wing of the Glenn Miller Ballroom and the adjacent Aspen Room at the conference venue.

ICSE-10 organizers and attendees are grateful for all the Sponsors that make this event possible.

The organizing Committees look forward to seeing you in Boulder, Colorado, or online soon.

Best regards,
Mathias, Dave, Alain, Eva, and Markus
Tenth Announcement

May 21, 2025
With the countdown ticking down fast, only two and a half weeks remain until the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) will start on June 8, 2025, in Boulder, Colorado. We are pleased to announce that the Abstract Book is now online. Please make sure to Register before Thursday, May 22, 2025! Reservations for low-cost accommodation in Campus Lodging are still available until May 23, 2025.

We are excited about our week-long program of Technical Sessions and Networking Events. We expect wonderful late Spring/early Summer weather, and the snow-capped 4,000 m peaks of the Continental Divide will provide for the most stunning backdrop of our meeting.

Abstract Book

The Abstract Book is now online in its preliminary version.

Please find the placement of your contribution in the Schedule of Events, and inform the conference organizers immediately if your scheduled contribution needs to be changed. Please also double check that your abstract is displayed satisfactorily.

Some changes to the Schedule of Events may occur as it is being finalized.

Conference Registration
Conference Registration for ICSE-10 is open until Thursday, May 22, 2025. Registration Fees are set at a rate of:
- $900 for Regular attendees,
- $500 for Student attendees, and
- $300 for Accompanying Guests for Social Events.
These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.
Please register on the ICSE-10 Online Registration website now!

Campus Lodging

Please make your arrangements for travel and accommodation. Low-cost accommodation in Campus Lodging is still available until May 23, 2025.

Check-in is Sunday, June 8; Check-out is Friday, June 13.
Single Lodging/Dining Package: $594.81 incl. tax
Double Lodging/Dining Package: $362.41 incl. tax
including 5 nights (Sunday 6/8 – Thursday 6/12), 5 breakfasts (Monday 6/9 – Friday 6/13) served in student dining halls, 1 linen packet (incl. sheets, towels, pillow & pillowcase and blanket or bedspread; packet will be set on bed, and guests will need to make their own bed), and free use of facilities in recreation center on main campus.

Add-on night(s)
Participants can add on 1-2 nights on each side of their stay. No meals included.
Single per night: $95.50 incl. tax
Double per night: $49.02 incl. tax.

Please reserve and pay on the Campus Lodging Reservation website now!

Sponsorship Opportunities

From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.
Exhibitors may register at rates according to their choice of two different booth sizes offered:
- Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
- Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.
Tables with table cloths, chairs, electric power, WiFi, and security will be provided.
Please contact Eva Schubert for booth reservations ASAP!

ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

Please refer to the Prospectus for detailed information about sponsorship opportunities.

The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon.

Best regards,
Mathias, Dave, Alain, Eva, and Markus

Welcome Message

Organizing Committee

Theory

Instrumentation

Applications

Yuxiang Zheng

Michelle Williams-Vaden

David Aspnes

Hans A. Bechtel

Shirly Espinoza

Thomas A. Germer

Kurt Hingerl

Hiroyuki Fujiwara

Ufuk Kilic

Taeyong Jo

Peter Petrik

Angelo Pierangelo

Viktor Rindert

Chris Sturm

Michelle Williams-Vaden

Important Dates

2025/04/01

2025/04/29

2025/05/01

2025/05/22

2025/05/23

Eleventh Announcement

Oral Presenter Guidelines

Poster Presenter Guidelines

Tenth Announcement